Low-Energy Argon Broad Ion Beam and Narrow Ion Beam Milling of In Situ Lift-Out FIB Specimens

Focused Ion Beam (FIB) Circuit Edit

Introduction While focused ion beam (FIB) circuit edit has been used for quite some time on older process nodes, it now offers even more important benefits as the industry migrates to smaller technologies. The stakes are rising at 28 nm and beyond, and it can now cost $10 million or more to bring a device to market. Manufacturers looking to mitigate risk are using FIB circuit edit to reduce cos...

Patterning of narrow Au nanocluster lines using V2O5 nanowire masks and ion-beam milling

Focused ion beam milling of microchannels in lithium niobate.

We present experimental and simulation results for focused ion beam (FIB) milling of microchannels in lithium niobate in this paper. We investigate two different cuts of lithium niobate, Y- and Z-cuts, and observe that the experimental material removal rate in the FIB for both Y-cut and Z-cut samples was 0.3 μm(3)/nC, roughly two times greater than the material removal rate previously reported ...

Focused-ion-beam fabrication of ZnO nanorod-based UV photodetector using the in-situ lift-out technique

1 Department of Physics, University of Central Florida, P.O. Box 162385, Orlando, USA 2 Department of Microelectronics and Semiconductor Devices, Technical University of Moldova, Stefan cel Mare Blvd. 168, 2004, Chisinau, Moldova 3 Apollo Technologies, Inc., 205 Waymont Court, S111, FL 32746, Lake Mary, USA 4 Advanced Materials Processing and Analysis Center, and Department of Mechanical, Mater...

100-fold reduction of electric-field noise in an ion trap cleaned with in situ argon-ion-beam bombardment.

Motional heating of trapped atomic ions is a major obstacle to their use as quantum bits in a scalable quantum computer. The detailed physical origin of this heating is not well understood, but experimental evidence suggests that it is caused by electric-field noise emanating from the surface of the trap electrodes. In this study, we have investigated the role of adsorbates on the electrodes by...